AnnealSys Products
Rapid Thermal Process
AS-ONE (Rapid Thermal Processing) AS-ONE
     - 4 and 6-inch low cost Rapid Thermal Processing (RTP) tool
     - Contact alloying
   - RTA
     - RTO
     - Glass reflow & etc.
   
  AS-MASTER Rapid Thermal Processing (RTCVD) AS-MASTER
     - 200-mm RTP and Rapid Thermal Chemical Vapor Deposition
     (RTCVD) tool
     - Implant annealing
   - RTO
   - RTN
   - RTCVD & etc.
 
LC100 (LPCVD) LC-100
   - 4-inch Low Pressure Chemical Vapor Deposition (LPCVD) furnace
   - Annealing
   - Oxidation
   - LPCVD & etc.
 
     
  MC100 (MOCVD) MC025 & MC100
     - Metal Organic Chemical Vapor Deposition (MOCVD) tools for R&D
     - Metals and alloys
     - Oxides
     - Transition metal nitrides
   
     
    For more information: AnnealSys
       
 
 
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