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AnnealSys Products |
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Rapid Thermal Process |
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 AS-ONE |
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- 4 and 6-inch low cost Rapid Thermal Processing
(RTP) tool |
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- Contact alloying |
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- RTA |
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- RTO |
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- Glass reflow & etc. |
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AS-MASTER |
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- 200-mm RTP and Rapid Thermal Chemical Vapor
Deposition
(RTCVD) tool |
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- Implant annealing |
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- RTO |
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- RTN |
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- RTCVD & etc. |
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LC-100 |
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- 4-inch Low Pressure Chemical Vapor Deposition
(LPCVD) furnace |
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- Annealing |
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- Oxidation |
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- LPCVD & etc. |
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MC025 & MC100 |
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- Metal Organic Chemical Vapor Deposition (MOCVD)
tools for R&D |
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- Metals and alloys |
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- Oxides |
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- Transition metal nitrides |
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For more information:
AnnealSys |
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